Electron Probe Microanalyser (EPMA), Jeol JXA8200 "Superprobe"

EMPA enables high magnification and high-resolution imaging at the micron scale, as well as quantitative spot analyses of solid materials (elements from B to U). Quantification is based on the comparison of X-ray intensities from a given sample with standards of known chemical composition. It is a non-destructive analytical method. The typical volume of spot analysis varies from 1 - 3 μm. Additionally, line traverses and elemental maps can be produced. The microprobe is installed at the Karl Franzens University of Graz.

Equipment:

• JEOL JXA8530F Plus Hyper Probe
• Wavelength dispersive spectrometers (WDS)
• Backscatter electron (BSE) imaging
• Secondary electron (SE) imaging