Technical specifications table

	HR	XL
General specifications
Maximum sample size (ØxH)	550 × 700 mm	800 × 1150 mm
Maximum Source-Detector-Distance	720 mm	1970 mm
Maximum temporal resolution	< 10 seconds/ 360˚ rotation	< 10 seconds/ 360˚ rotation
Spatial resolution	600 nm	3 µm ( < 4 µm in 3D)

X-ray tubes
	Open-type Nanofocus	Open-type Microfocus
	Transmission	Reflection
Accelerating voltage / Accelerating voltage	20-160 kV / 50 W	30-180 kV / 300 W
Cooling	Water	Water

Detector
	CMOs	amorphous Si flat panel
Pixel matrix	1920 × 3024	2856 × 2856
Active area	145 × 228 mm	428.4 × 428.4 mm
Frame rate (without binning)	26 fps	14 fps
Dynamic range	16 bits	16 bits
Binning geometries	3	14

Mechanical specifications
Motorization	10	9
Available space around the sample stage	720 × 785 × 710 mm	1970 × 1200 × 1160 mm
Cabinet dimensions (W × L × H)	1050 × 2100 × 2000 mm	1580 × 3500 × 2150 mm
Weight	2950 kg	6550 kg

Scanning modes

stop and shoot – Stop and shoot for each 2D projection (time consuming)
Smooth scan - Scan scheme, without stopping the stage for each 2D projection during the scan (no “stop and shoot”). In combination with the “continuous scan”, best for in situ or fast scans.
Continuous scan - Scan, without stopping at 360° - TESCAN XRE specialty, in combination with “smooth scan” best for in situ or fast scans.
VOIS (Volume-Of-Interest-Scan) - By drawing a VOI into the 3D overview scan result, the system will automatically move the stage to the selected position, to perform a higher resolution scans of the interesting volume.
STAMIA (Stacked and Merged Image Acquisition) – Scan vertically stacked samples or samples up to 1 meter in height and merge the results to one overview.
Detector tiling - All detectors are placed on a high precision motorized translation stage perpendicular to the optical axis (y-direction). This enables detector tiling and virtually increases the surface area of the detector, enhancing the FOV (~ twice).
Helical Scan – Good for planar defects in elongated samples.
Batch scanning - Multiple samples can be placed together on the rotational stage and these samples can be scanned consecutively, without user interaction for each sample.
User defined – The software can be set up with user defined scan protocols. All components are motorized and controllable via the SW. Batch scans of all combinations of scan modes above can be also done.